JPH0338689Y2 - - Google Patents

Info

Publication number
JPH0338689Y2
JPH0338689Y2 JP1982141523U JP14152382U JPH0338689Y2 JP H0338689 Y2 JPH0338689 Y2 JP H0338689Y2 JP 1982141523 U JP1982141523 U JP 1982141523U JP 14152382 U JP14152382 U JP 14152382U JP H0338689 Y2 JPH0338689 Y2 JP H0338689Y2
Authority
JP
Japan
Prior art keywords
sample
tool
particle beam
analyzer
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982141523U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5945557U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14152382U priority Critical patent/JPS5945557U/ja
Publication of JPS5945557U publication Critical patent/JPS5945557U/ja
Application granted granted Critical
Publication of JPH0338689Y2 publication Critical patent/JPH0338689Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP14152382U 1982-09-18 1982-09-18 試料の表面分析装置 Granted JPS5945557U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14152382U JPS5945557U (ja) 1982-09-18 1982-09-18 試料の表面分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14152382U JPS5945557U (ja) 1982-09-18 1982-09-18 試料の表面分析装置

Publications (2)

Publication Number Publication Date
JPS5945557U JPS5945557U (ja) 1984-03-26
JPH0338689Y2 true JPH0338689Y2 (en]) 1991-08-15

Family

ID=30316507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14152382U Granted JPS5945557U (ja) 1982-09-18 1982-09-18 試料の表面分析装置

Country Status (1)

Country Link
JP (1) JPS5945557U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002310961A (ja) * 2001-04-19 2002-10-23 Fujitsu Ltd 深さ方向元素分布測定法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54145061U (en]) * 1978-03-31 1979-10-08

Also Published As

Publication number Publication date
JPS5945557U (ja) 1984-03-26

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